Physical Electronics VersaProbe II XPS

Equipment Type

X-ray Photoelectron Spectroscope

Manufacturer

Physical Electronics

Model

Physical Electronics VersaProbe II XPS

Location

Surface Science Suite

The core technology of the VersaProbe II is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Standard features include PHI’s patented dual beam charge neutralization technology, a floating column Ar ion gun for XPS sputter depth profiling. Multi-technique options include a scanning electron gun for submicron surface analysis by Auger Electron Spectroscopy and a UV lamp for Ultra-violet Photoelectron Spectroscopy (UPS) measurements. New features with VersaProbe II include a 128 channel detector, a new SmartSoft user interface, and optional 20 kV C60+, and 20 kV Ar2500+ cluster source ion guns for polymer and organic thin film analysis.

Manufacturer’s Page

Specifications

  • Dual beam charge neutralization
  • Floating column argon ion gun
  • Compucentric Zalar rotation
  • Angle dependent XPS
  • 20 kV C60+ ion gun
  • 20 kV Ar2500+ gas cluster ion gun
  • UV light source for UPS
  • Hot / Cold sample manipulator