X-ray Photoelectron Spectroscope
Physical Electronics VersaProbe II XPS
Surface Science Suite
The core technology of the VersaProbe II is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Standard features include PHI’s patented dual beam charge neutralization technology, a floating column Ar ion gun for XPS sputter depth profiling. Multi-technique options include a scanning electron gun for submicron surface analysis by Auger Electron Spectroscopy and a UV lamp for Ultra-violet Photoelectron Spectroscopy (UPS) measurements. New features with VersaProbe II include a 128 channel detector, a new SmartSoft user interface, and optional 20 kV C60+, and 20 kV Ar2500+ cluster source ion guns for polymer and organic thin film analysis.