Scanning Electron Microscope
FEI Helios NanoLab 660 SEM/FIB
Scanning Electron Microscope / Focused Ion Beam
The FEI Helios NanoLab 660 features the most recent advances in field emission SEM (FESEM) and focused ion beam (FIB) technologies and their combined use. This DualBeam SEM/FIB is designed for demanding nanoscale work, resolving the finest details (extremely high resolution) in 2D and 3D with clearest contrast, nanoprototyping, and highest quality sample preparation.
The Helios NanoLab 660 is a highly flexible platform for high productivity TEM sample preparation and high performance imaging. It is designed to deliver multi-scale, multi-dimensional insights, and down to sub-nm resolution. The combination of automated sequential focused ion beam (FIB) milling and scanning electron microscope (SEM) imaging allow for collection of a series of 2D images, which leads to 3D volume reconstructions. The attached Oxford EDX detector provides elemental and chemical analysis that gathers accurate data at the micro- and nanoscales.